한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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- Pages.170-170
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- 2000
keV and MeV Ion Beam Modification of Polyimide Films
- Lee, Yeonhee (Advanced Analysis Center, Korea Institute of Science & Technology) ;
- Seunghee Han (Advanced Analysis Center, Korea Institute of Science & Technology) ;
- Song, Jong-Han (Advanced Analysis Center, Korea Institute of Science & Technology) ;
- Hyuneui Lim (Advanced Analysis Center, Korea Institute of Science & Technology) ;
- Moojin Suh (Advanced Analysis Center, Korea Institute of Science & Technology)
- 발행 : 2000.02.01
초록
Synthetic polymers such as polyimide, polycarbonate, and poly(methyl methacrylate) are long chain molecules which consist of carbon, hydrogen, and heteroatom linked together chemically. Recently, polymer surface can be modified by using a high energy ion beam process. High energy ions are introduced into polymer structure with high velocity and provide a high degree of chemical bonding between molecular chains. In high energy beam process the modified polymers have the highly crosslinked three-dimensionally connected rigid network structure and they showed significant improvements in electrical conductivity, in hardness and in resistance to wear and chemicals. Polyimide films (Kapton, types HN) with thickness of 50~100
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