한국마린엔지니어링학회:학술대회논문집 (Proceedings of the Korean Society of Marine Engineers Conference)
- 한국마린엔지니어링학회 2000년도 춘계학술대회 논문집(Proceeding of the KOSME 2000 Spring Annual Meeting)
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- Pages.105-109
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- 2000
SOI 웨이퍼의 열적거동 해석
Thermal Behaviors Analysis for SOI Wafers
초록
Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor the size of the pressure sensor diaphragm have become smaller year by year and a microaccelerometer with a size less than 200-300