반도체 플라즈마 용융장치용 고출력 능동 클램프 ZVS 플라이백 컨버터 설계에 관한 연구

A Study on the Design of the High Power Active Clamp ZVS Flyback Converter for Semiconductor Plasma Etching System

This paper deals with the active clamp ZVS flyback converter for semiconductor plasma etching system. The proposed converter has the characteristics of the good power facter low switching noise and efficiency improvement. The characteristics are verified through simulation results. Furthermore the ringing effect due to output capacitance of the main switch can be eliminated by use of active clamp circuit.