Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.07c
- /
- Pages.1685-1686
- /
- 2000
Preparation of Ferroelectric PZT thin films by Sol-Gel processing
Sol-Gel법에 의한 강유전체 PZT 박막의 제작
- Lee, B.S. (Inha Univ.) ;
- You, D.H. (Ansan tech coll.) ;
- Shin, T.H. (Yuhan coll.) ;
- Cho, K.S. (Yuhan coll.) ;
- Yuk, J.H. (Yuhan coll.) ;
-
Kim, Y.H.
(Kyoungwon Univ.)
;
- Kim, H.G. (BES Co., Ltd.) ;
- Ji, S.H. (Yamagada) ;
- Lee, D.C. (Inha Univ.)
- 이병수 (인하대 전기공학과) ;
- 유도현 (안산공대 전기과) ;
- 신태현 (유한대 전기과) ;
- 조기선 (유한대 전기과) ;
- 육재호 (유한대 전기과) ;
-
김용혁
(경원전대 전기과)
;
- 김형권 (BES(주) FPD 팀) ;
- 지승한 (일본산형대) ;
- 이덕출 (인하대 전기공학과)
- Published : 2000.07.17
Abstract
Crack-free and homogeneous com ceramic and epitaxial lead zirconate titanat ferroelectric thin films with perovskite structure been prepared by sol-gel processing. Ti-isoprop and lead acetate trihydrate and zirconium-pro are used raw materials. EAcAc is used as a cat 2-Methoky ethanol is used as a solvent annealing temperatures of the thin films are 0
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