대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2000년도 하계학술대회 논문집 D
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- Pages.2796-2798
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- 2000
단결정 성장을 위한 자동 가스 조절용 전동밸브 설계
Design of electrical gas valve system for sing1e crystalline growth
- Cho, Hyeon-Seob (Chungwoon Unviersity) ;
- Kim, Jong-Ok (Wonkwang University) ;
- Min, Byoung-Cho (Wonkwang University) ;
- Kim, Hee-Suk (Wonkwang University)
- 발행 : 2000.07.17
초록
It is a quite quality concerning to control temperature of single crystalline growth as it does when you get most of heat treating products. It is also important factor to control temperature when you make the
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