대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2000년도 하계학술대회 논문집 D
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- Pages.2766-2768
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- 2000
반도체 및 금속의 면저항, 비저항 측정시스템의 자동화
The automatic measurement system of sheet resistance and resistivity of semiconductor and metals
- 류제천 (한국표준과학연구원) ;
- 김동진 (부산대학교 물리학과) ;
- 강전홍 (한국표준과학연구원) ;
-
김규태
(한국표준과학연구원)
;
-
송양섭
(한국표준과학연구원)
;
-
유광민
(한국표준과학연구원)
- Ryu, Je-Cheon (Korea Res. Inst. of Sci. and Stand.) ;
- Kim, Dong-Jin (Physics Dept. of Pusan Nati. Univ.) ;
- Kang, Jeong-Hong (Korea Res. Inst. of Sci. and Stand.) ;
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Kim, Kyu-Tae
(Korea Res. Inst. of Sci. and Stand.)
;
-
Song, Yang-Sup
(Korea Res. Inst. of Sci. and Stand.)
;
-
Yu, Kwang-Min
(Korea Res. Inst. of Sci. and Stand.)
- 발행 : 2000.07.17
초록
We were made the automatic measurement system of sheet resistance and resistivity of semiconductor and metals with accuacy. The use of this system measured SRM(Standard Reference Materials) silicon wafers which calibrated by NIST. From this result. this system operated with the standard deviation within maximum
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