Precision Control of a Piezoelectric Actuator Based on an Inverse Hysteresis Model

역 히스테리시스 모델에 기초한 압전 구동기의 정밀제어

In this paper, we proposed an inverse hysteresis model to cancel the nonlinear hysteresis phenomenon of a piezoelectric actuator and design a feedback control system based on the inverse hysteresis model. The piezoelectric actuator performs much better in open-loop response. However, the nonlinear hysteresis phenomenon should be linearized and the closed-loop control should be executed to get the required performance in the area, where high-speed and high-accuracy are required. Thus, it is shown by simulation that a good position tracking performance can be obtained for the repetitive desired position trajectory.