Development of a new deposition system for a 12m long YBCO coated conductor
12m 길이의 YBCO 초전도선재 개발을 위한 새로운 증착방법
- Lee, Byoung-Su (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Kim, Ho-Sup (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Youm, Do-Jun (Department of Physics, Korea Advanced Institute of Science and Technology)
- Published : 1999.08.18
Abstract
To solve the problems in the present ree1-to-reel deposition method, we have developed a new deposition system for a 12m long YBCO coated conductor. The system comprises two chambers, a reaction chamber and a evaporation chamber which are connected through window. A tan long fi tape textured by RABiTS was wound around a cylinderical sample holder of 20cm diameter. The cylinder was rotated in the reaction chamber during deposition of YBCO film by coevaporation. We'll describe the details of the performance of this system as well as the RABiTS process for a 12m long Ni tape.
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