Fabrication of 14 GHz Hairpin Type YBCO Filters

For the enhancement of communication system performance, high quality filters are required. Conventional metal filters made of copper can be substituted by high quality high temperature superconductivity(HIS) flms for better performance. In order to reduce the size of the filter for the integration of device in the limited area, we have fabricated hairpin type filters using pulsed laser deposition(PLD) technique. The superconducting YBCO thin films have been grown on MgO substrates by PLD with Nd:YAC laser. The YBCO films were patterned by conventional wet-etching process. We have compared YBCO filters and copper filters which were made with the same spec. Simulated and measured frequency responses reveal that HIS YBCO hairpin type bandpass filters show better performance than copper filters.