한국초전도학회:학술대회논문집

The Korean Superconductivity Society (한국초전도학회)
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Preparation of YBa$_2Cu_#O_x$ films by MOCVD using single liquid solution source

단일액상원료를 사용하는 MOCVD법에 의한 YBa$_2Cu_3O_x$ 박막 제조에 관한 연구

  • Kim, Bo-Ryoun (Department of Chemical Engineering and Technology, ChonBuk National University) ;
  • Lee, Hee-Gyoun (Functional Materials Laboratory, Korea Atomic Energy Research Institute) ;
  • Hong, Gye-Won (Functional Materials Laboratory, Korea Atomic Energy Research Institute) ;
  • Jee, Young-A (Functional Materials Laboratory, Korea Atomic Energy Research Institute) ;
  • Shin, Hyung-Shik (Department of Chemical Engineering and Technology, ChonBuk National University)
  • 김보련 (전북대학교 화학공학부) ;
  • 이희균 (한국 원자력 연구소 기능성재료실) ;
  • 홍계원 (한국 원자력 연구소 기능성재료실) ;
  • 지영아 (한국 원자력 연구소 기능성재료실) ;
  • 신형식 (전북대학교 화학공학부)
  • Published : 1999.08.18
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Abstract

A new single solution source MOCVD technique for the deposition of YBCO film has been developed, using a ultrasonic atomizer to feed the precursors into an evaporation zone. This method being investigated as a basis for future long wire fabrication, for example the electric power use, the magnatic applications, etc.. YBCO films were prepared on MgO(100) substrate, using mixture of Y, Ba, and Cu ${\beta}$ -diketonate chelate was dissolve in tetrahydrofuran as a solution sources. X-ray diffraction measurement indicated that the thin film grew epitaxially with the c-axis orientation perpandicular to the surface of the surface.

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