한국초전도학회:학술대회논문집
- 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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- Pages.67-70
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- 1999
균질한 대면적 YBCO 박막증착을 위한 실린더형 할로우 캐소드 스퍼터링 증착법
Cylindrical Hollow Cathode Sputtering Deposition for Uniform Large Area YBCO Thin Film
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서정대
(한국전자통신연구원, 원천기술연구본부) ;
- 한석길 (한국전자통신연구원, 원천기술연구본부) ;
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성건용
(한국전자통신연구원, 원천기술연구본부) ;
- 강광용 (한국전자통신연구원, 원천기술연구본부)
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Suh, Jeong-Dae
(Telecommunications Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Han, Seok-Kil (Telecommunications Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
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Sung, Gun-Yong
(Telecommunications Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Kang, Kwang-Yong (Telecommunications Basic Research Laboratory, Electronics and Telecommunications Research Institute)
- 발행 : 1999.08.18
초록
We have fabricated YBa
키워드