Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.11d
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- Pages.1066-1068
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- 1999
A study on the characteristics of axially magnetized capacitively coupled radio frequency plasma
축 방향 자장이 인가된 용량 결합형 라디오 주파수 플라즈마의 특성 연구
- Lee, Ho-Jun (Department of Electrical Engineering, Uiduk University) ;
- Yi, Dong-Yung (Department of Electrical Engineering, Uiduk University) ;
- Tae, Heung-Sik (School of Electronic and Electrical Engineering, Kyungpook National University) ;
- Whang, Ki-Woong (School of Electrical Engineering, Seoul National University)
- Published : 1999.11.20
Abstract
Magnetic field is commonly used in low temperature processing plasmas in order to obtain high density. E
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