Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.11d
- /
- Pages.959-961
- /
- 1999
Deposition and characterization of ZnO thin films for piezo-electric devices
압전 소자용 ZnO 박막의 증착 및 물성 분석
- Lee, Jin-Bock (Dep. of Electrical Engineering, Hanyang Univ.) ;
- Kim, Kwi-Hyun (Dep. of Electrical Engineering, Hanyang Univ.) ;
- Shin, Yang-Ho (Dep. of Electrical Engineering, Hanyang Univ.) ;
- Seo, Soo-Hyung (Dep. of EM&C, Hanyang Univ.) ;
- Park, Jin-Seok (Dep. of Electrical Engineering, Hanyang Univ.)
- 이진복 (한양대학교 전기공학과) ;
- 김귀현 (한양대학교 전기공학과) ;
- 신양호 (한양대학교 전기공학과) ;
- 서수형 (한양대학교 전자재료 및 부품연구센터) ;
- 박진석 (한양대학교 전기공학과)
- Published : 1999.11.20
Abstract
ZnO thin films are deposited by using an RF magnetron sputtering system. Structural and electrical properties are analyzed as a function of deposition conditions, such as RF power, Ar/(
Keywords