Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.11d
- /
- Pages.863-866
- /
- 1999
The Characteristics of (Ba,Sr)$TiO_3$ Thin Films Etched With The high Density $BCl_3/Cl_2$ /Ar Plasma
$BCl_3/Cl_2$ /Ar 고밀도 플라즈마에서 (Ba,Sr)$TiO_3$ 박막의 식각 특성에 관한 연구
- Kim, Seung-Bum (Department of Electrical Engineering, Chung-Ang University) ;
- Kim, Chang-Il (Department of Electrical Engineering, Chung-Ang University)
- Published : 1999.11.20
Abstract
(Ba,Sr)
Keywords