Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.11d
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- Pages.860-862
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- 1999
Growth of vertically aligned carbon nanotubes on a large area silicon substrates by chemical vapor deposition
CVD 에 의한 대면적 실리콘기판위에서 수직방향으로 정렬된 탄소나노튜브의 성장
- Lee, Cheol-Jin (School of Electrical Engineering, Kunsan National University) ;
- Park, Jeong-Hoon (School of Electrical Engineering, Kunsan National University) ;
- Son, Kwon-Hee (School of Electrical Engineering, Kunsan National University) ;
- Kim, Dae-Woon (School of Electrical Engineering, Kunsan National University) ;
- Lee, Tae-Jae (School of Electrical Engineering, Kunsan National University) ;
- Lyu, Seung-Chul (School of Electrical Engineering, Kunsan National University)
- 이철진 (군산대학교 전기전자제어공학부) ;
- 박정훈 (군산대학교 전기전자제어공학부) ;
- 손권희 (군산대학교 전기전자제어공학부) ;
- 김대운 (군산대학교 전기전자제어공학부) ;
- 이태재 (군산대학교 전기전자제어공학부) ;
- 류승철 (군산대학교 전기전자제어공학부)
- Published : 1999.11.20
Abstract
we have grown vertically aligned carbon nanotubes on a large area of Co-Ni codeposited Si substrates by thermal chemical vapor deposition using
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