Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.11d
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- Pages.851-853
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- 1999
Characterization of tribologic DLC thin films fabricated by pulsed laser deposition
펄스 레이저 증착법에 의한 DLC 박막의 내마모성 특성변화
- Shim, Kyung-Suk (Department af Electrical Engineering, Yonsei University) ;
- Lee, Sang-Yeol (Department af Electrical Engineering, Yonsei University)
- Published : 1999.11.20
Abstract
DLC thin films have been fabricated by pulsed laser deposition with various deposition parameters. The characterization of fabricated thin films was performed depending on the deposition parameters. As the kinetic energies provided by deposition temperature and the laser energy density were increased, the film showed graphite properties. Structural properties of the films were investigated by Raman spectroscopy. The growth energy should be optimized to fabricate high quality DLC thin films. DLC films showed high hardness and their friction coefficient was measured to be about 0.2 regardless of the load of the ball pin.
Keywords