Pad and Parasitic Modeling for MOSFET Devices

MOSFET 기생성분 모델링

This paper presents the accurate deembeding method for pad and parasitics of MOSFET device. rad effects are deembedded using THRU LINE, which is much simpler method without laborious fitting procedure compared with conventional OPEN and SHORT pad modeling. Parasitic resistance extraction uses the algebraic relation between increments of inversion layer charge and oxide capacitance. It is especially adequate for insulating gate junction device. Extracted parasitics are verified through comparing modeled and measured S parameters.