Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 1999.06a
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- Pages.954-957
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- 1999
Growth of carbon nanotubes on a large area of Si substrate by the thermal chemical vapor deposition
열화학기상증착법에 의한 대면적 실리콘 기판위에서의 탄소나노튜브 성장
Abstract
We have synthesized carbon nanotubes by thermal chemical vapor deposition of
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