The Properties of Inductively Coupled Plasma Oxidized Polysilicon Films and Thin Film Transistors

  • Park, Yong-Woo (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Ahn, Jin-Hyung (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Ahn, Byung-Tae (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
  • Published : 1999.05.01