Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
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- Pages.692-695
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- 1999
The Annealing Characteristics of Chromiun Nitride Thin-Film Strain Gauges
크롬질화박막형 스트레인 게이지의 열처리 특성
Abstract
This paper presents annealing characteristics of CrN thin-film strain gauges, which were deposited on glass by DC reactive magnetron sputtering in an argon-nitrogen atmosphere)Ar-(5-~25%)
Keywords