한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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- Pages.118-121
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- 1999
고집적 DRAM소자용 14/50/50 PLZT 박막의 특성에 관한 연구
A Study on Characteristic of the 14/50/50 PLZT Thin Film for DRAM Capacitor
초록
PLZT thin films were fabricated with different energy density by pulsed laser deposition. PLZT films deposited on Pt/Ti/SiO
키워드