Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
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- Pages.311-314
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- 1999
Microstructural Properties of PZT Heterolayered Thin Films Prepared by Sol-Gel Method
솔-젤법으로 제작한 PZT 이종층 박막의 구조적 특성
Abstract
Ferroelectric PZT heterolayered thin films were fabricated by spin coating method on the Pt/Ti/SiO
Keywords