한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

기판온도에 따른 ZnO박막의 결정구조 및 전기적 특성

The effect of substrate temperature on crystallography and electrical properties of ZnO thin films

  • 금민종 (경원대학교 공대 전기전자공학부) ;
  • 성하윤 (신성대학 전기과) ;
  • 손인환 (경원대학교 공대 전기전자공학부) ;
  • 장경욱 (경원대학교 공대 전기전자공학부) ;
  • 김경환 (경원대학교 공대 전기전자공학부)
  • 발행 : 1999.11.01
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초록

In this paper we studied that the effect of substrate temperature on crystallography and electrical properties of ZnO thin films. Facing Targets Sputtering system can deposit thin films in plasma-free situation and change the deposition condition in wide range. And prepared thin film\`s c-axis orientation and grain size were analyzed by XRD(x-ray diffractometer). In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin film with good c-axis orientation.

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