초경합금 기판 위에 성장된 다이아몬드 박막의 내마모 특성

Wear behaviors of diamond thin films deposited on WC-Co substrate

  • 발행 : 1999.11.01

초록

We prepared diamond thin films on WC-Co substrate in a mixtured $H_2-CH_4-O_2$, gas, using 13.%MHz RF PACVD. Scanning electron microscopy, X-ray diffraction and Rarnan spectroscopy were used to analyze the characteristics of thin film, and tribometer of ball-on-disk type were used to test the wear resistance between thin film and substrate. The good diamond quality and wear resistance was appeared with cemented tungsten carbide substrate treated with oxygen plasma.

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