한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

박막전지용 LIPON 전해질 박막의 제조 및 특성 평가

Fabrication and Characterization of LIPON Electrolyte Thin Film for All Solid State Thin Film Battery

  • 손봉희 (한국과학기술연구원 박막연구센터) ;
  • 전은정 (경원대학교 전기전자공학과) ;
  • 남상철 (한국과학기술원 전지.연료전지센터) ;
  • 조원일 (한국과학기술원 전지.연료전지센터) ;
  • 윤영수 (한국과학기술연구원 박막연구센터)
  • 발행 : 1999.11.01
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초록

The preparation and electrical properties of LIPON electrolyte were investigated in order to fabricate all solid state thin film battery. The LIPON thin film was deposited by r.f. sputtering of Li$_3$PO$_4$ target in O$_2$-N$_2$ mixtures. The LIPON deposited at N$_2$+10% O$_2$ ratio had a conductivity at 25 $^{\circ}C$ of 1.8${\times}$10$\^$-6/S/cm. The ion conductivity of the LIPON films decreased as the O$_2$ content of the process gas increased.

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