한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 추계학술대회 논문집
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- Pages.391-394
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- 1999
MPCVD에 의한 다이아몬드 박막의 결정구조 해석
Crystal Structure Ana1ysis of the Diamond Films Grown by MPCVD
초록
The diamond thin films are deposited on silicon using MPCVD(Microwave Plasma Chemical Vapor Deposition) method at various deposition microwave power and time. Diamond is deposited with 100 sccm H