한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

RF 마그네트론 스퍼터링에 의한 ZnO 박막 SAW 필터에 관한 연구

A Study on the ZnG Thin Film SAW filter by RF Sputter

  • 박용욱 (한국과학기술연구원 박막연구센터) ;
  • 이동윤 (한국과학기술연구원 박막연구센터) ;
  • 백동수 (한국과학기술연구원 박막연구센터) ;
  • 윤석진 (한국과학기술연구원 박막연구센터) ;
  • 김현재 (한국과학기술연구원 박막연구센터) ;
  • 박창엽 (연세대학교 전기컴퓨터 공학과)
  • 발행 : 1999.11.01
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초록

ZnO thin films on glass substrate were deposited by RF magnetron reactive sputter with various argodoxygen gas ratios and substrate temperatures. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, XPS and electrometer(keith1ey 617). All films showed a strong prefered orientation along the c-axis on glass substrate, and the chemical stoichiometry was obtained at Ar/$O_2$=50/50. The propagation velocity of ZnO SAW filter was about 2, 590 dsec and insertion loss was a minimum value of about -21dB.

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