Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.178-178
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- 1999
A Study on the Processing Conditions of Ion Shower Doping for the Fabrication of Low Temperature Poly-Si TFT
저온 poly-Si TFT의 제조시 Ion Shower Doping의 공정변수에 관한 연구
Abstract
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