Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.88-88
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- 1999
A study of improvement on the dry etch characteristics of Al-Nd films for application to thin-film-transister liquid crystal displays
TFT-LCD용 Al-Nd 박막의 건식식각특성 개선에 관한 연구
Abstract
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