A transmission electron microscope study of two-dimensional dopant profiling in $n^+$/p junctions

투과전자현미경을 이용한 $n^+$/p 접합에서 불순물의 이차원적 분포에 관한 연구

Park, Chel-Jong (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
Seong, Tae-Yeon (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology)