한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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- Pages.167-167
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- 1999
Quantitative Surface Analysis using Laser Ionisation Mass Spectrometry
- King, Bruce V. (Associate Professor, Department of Physics, University of Newcastle)
- 발행 : 1999.07.01
초록
In laser ionisation mass spectrometry (LIMS) atoms and molecules which are desorbed from solid surfaces are ionised by an intense laser beam. The photoions which are created are then mass analysed in a time-of-flight mass spectromenter. In best situations, 10% of the ejected particles can be detected, giving the technique^g , pp b sensitivity. Since the ionisation and desorption steps are separated, matrix effects are minimised, in contrast to competitor techniques like SIMS, so quantitation is improved. The talk will illustrate the application of LIMS to basic studies in sputtering in Sr, Cu3Au(100) and Ni3Al(100) as well as ultratrace analysis of Zr in Si.
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