Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1999.07a
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- Pages.110-110
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- 1999
Dielectric properties of Pt/PVDF/Pt modified by low energy ion beam irradiation
- Sung Han (Thin film technology research center, KIST) ;
- Yoon, Ki-Hyun (Dept. of Ceramic engineering, Yonsei university) ;
- Jung, Hyung-Jin (Thin film technology research center, KIST) ;
- Koh, Seok-Keun (Thin film technology research center, KIST)
- Published : 1999.07.01
Abstract
Polyvinylidenefluoride (PVDF) is most used in piezoelectric polymer industry. Electrode effect on the electrical properties of PVDF has been investigated. al has been used due to fair adhesion for PVDF. Work function of metal plays an important role on the electrical properties of ferroelectrics for top and /or bottom electrode. However, Al has much lower work function than Pt or Au and so leakage current of Al/PVDF/Al may be large. Pt or Au has not been used for electrode of PVDF system due to poor adhesion. PVDF irradiated by Ar+ ion beam with O2 environment takes good adhesion to inert metal. Contact angle of PVDF to triple distilled water was reduced from 75
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