Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1999.07a
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- Pages.102-102
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- 1999
Dependence of Thermal Annealing Conditions on Photoluminescence in $SiO_2$ films
- Lee, Jae-Hee (surface Physics Lab. Kyungil University, Kyungsan) ;
- Lee, Weon-Sik (Sensor & Instrumentation Research Team, RIST, Pohang) ;
- Kim, Kwang-Il (Sensor & Instrumentation Research Team, RIST, Pohang)
- Published : 1999.07.01
Abstract
Visible photoluminescence(PL) in si-implanted SiO2 films on crystaline silicon were observed. Thermal oxide films of 1
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