초음파 리니어 모터의 설계와 유한요소 해석

Design and FEM Analysis of Ultrasonic Linear Motor

The standing waves of the fourth bending ode of vibration and the first longitudinal mode of vibration were utilized to construct a ultrasonic linear motor. The geometrical dimensions of the vibrator were determined by Euler-Bernoulli theory. FEM(finite element method) employed to calculate the vibration mode of the metal-piezoceramic composite thin plate vibrator. ANSYS was used to design positions of the projections and calculate displacement of vibrator.