Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07d
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- Pages.1989-1991
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- 1999
The Characteristics of Chromiun Nitride Thin-Film Strain Gauges
크롬질화박막형 스트레인 게이지의 특성
- Seo, Jeong-Hwan (School of Information & Communication Eng. DongSeo Univ.) ;
- Kim, Il-Myung (School of Information & Communication Eng. DongSeo Univ.) ;
- Lee, Chae-Bong (School of Information & Communication Eng. DongSeo Univ.) ;
- Kim, Sun-Cheol (Kyungnam College of Information) ;
- Chung, Gwiy-Sang (School of Information & Communication Eng. DongSeo Univ.)
- Published : 1999.07.19
Abstract
This paper presents characteristics of CrN thin-film strain gauges, which were deposited on glass by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-
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