대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 D
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- Pages.1795-1796
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- 1999
PET 기판상에 증착된 ITO박막의 산소영향
Oxygen Effects of ITO Thin Films Deposited on PET Substrate
- Kim, H.H. (Doowon College) ;
- Park, C.H. (Chungbuk University) ;
- Lim, K.J. (Chungbuk University) ;
- Shin, J.H. (Agency for Technology and Standards) ;
- Shin, S.H. (Agency for Technology and Standards) ;
- Park, K.J. (Agency for Technology and Standards)
- 발행 : 1999.07.19
초록
ITO thin films have been deposited on PET substrate by reactive dc magnetron sputtering without substrate heater and post heat treatment. The electrical and optical properties of as-deposited films are dominated by oxygen gas ratio. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows: operating pressure of 5 mTorr, target-substrate distance of 4.5 cm, dc power of
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