대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

$LaFeO_3$ 박막센서의 제작 및 가스 검지 특성

The fabrication and gas sensing characteristics of $LaFeO_3$ thin film sensor

  • 장재영 (경상대학교 전자재료공학과) ;
  • 신정호 (경상대학교 전자재료공학과) ;
  • 김태중 (경상대학교 전자재료공학과) ;
  • 김준곤 (경상대학교 전자재료공학과) ;
  • 박기철 (경상대학교 전자재료공학과) ;
  • 김정규 (경상대학교 전자재료공학과)
  • Jang, Jae-Young (Dept. of Electronic Materials Eng. Gyeongsang Nat'1 Univ.) ;
  • Shin, Jeong-Ho (Dept. of Electronic Materials Eng. Gyeongsang Nat'1 Univ.) ;
  • Kim, Tae-Jung (Dept. of Electronic Materials Eng. Gyeongsang Nat'1 Univ.) ;
  • Kim, Jun-Gon (Dept. of Electronic Materials Eng. Gyeongsang Nat'1 Univ.) ;
  • Park, Ki-Chul (Dept. of Electronic Materials Eng. Gyeongsang Nat'1 Univ.) ;
  • Kim, Jeong-Gyoo (Dept. of Electronic Materials Eng. Gyeongsang Nat'1 Univ.)
  • 발행 : 1999.07.19
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초록

As new gas sensing material with high cata activity for NO decomposition and for CO oxid $LaFeO_3$ thin films with different thicknesses fabricated by the R.F. magnetron sputtering m on an $Al_2O_3$ substrates with Ag electrodes. The sensing characteristics of the $LaFeO_3$ thin films studied as a function of annealing temperature film thickness. The thin film annealed at showed the highest sensitivity of 110% for CO 60% for NO.

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