Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the ITO Thin Films on Plastic Substrate Using by Powdery Targ

분말 타겟을 이용한 플라스틱 기판 상의 ITO 박막 제조에 관한 연구

  • Lee, J.H. (School of Electrical & Computer, Sungkyunkwan Univ.) ;
  • Park, Y.K. (School of Electrical & Computer, Sungkyunkwan Univ.) ;
  • Shin, J.H. (Inorganic Chemistry Division, N.) ;
  • Shin, S.H. (Inorganic Chemistry Division, N.) ;
  • Park, K.J. (Inorganic Chemistry Division, N.)
  • 이재형 (성균관대학교 전기전자 및 컴퓨터공학부) ;
  • 박용관 (성균관대학교 전기전자 및 컴퓨터공학부) ;
  • 신재혁 (국립 기술 표준원) ;
  • 신성호 (국립 기술 표준원) ;
  • 박광자 (국립 기술 표준원)
  • Published : 1999.07.19
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Abstract

ITO films on plastic substrate were prepared by DC magnetron sputtering method using powdery target and their properties were investigated as a function of the deposition conditions. As the sputtering power and total pressure were higher, the resistivity of ITO films increased. The optical transmittance deteriorated with increasing sputtering power and thickness. As the total pressure increased, however, the optical transmittance improved at visible region of light. From these results, we could deposited ITO films with $8{\times}10^{-3}{\Omega}-cm$ of resistivity and 80% of transmittance at optimal conditions.

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