$CO_2$ Sensing Characteristics of PLD NASICON Thin Films

PLD법에 의해 제작된 NASICON 박막의 $CO_2$ 감지특성

Our $CO_2$ sensor is based on an electrochemical reaction involving NASICON, Ba-Stabilized $Na_2CO_3$, two Pt electrodes, $O_2$, and $CO_2$.. NASICON thin films were deposited by pulsed laser deposition(PLD). The sensitive electrode made of Ba-stabilized sodium carbonate was magnetron sputtered. An emf between two Pt electrodes was proportional to the logarism of the concentration of $CO_2$ in the ambient. This sensor has a sensitivity of 3.82mV/decade and does not show any saturation for $CO_2$ concentration as high as 200,000 ppm.