대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 D
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- Pages.1523-1525
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- 1999
분위기 산소압변화에 따른 ZnO박막의 UV발광 특성분석
UV emission characterization of ZnO thin films depending on the variation of oxygen pressure
- Bae, Sang-Hyuck (Department of Electrical Engineering Yonsei University) ;
- Lee, Sang-Yeol (Department of Electrical Engineering Yonsei University)
- 발행 : 1999.07.19
초록
ZnO is a wide-bandgap II-VI semiconductor and has a variety of potential application. ZnO exhibits good piezoelectric, photoelectric and optic properties, and is good for a electroluminescence device. ZnO films have been deposited at (0001) shappire by PLD technique. Chamber was evacuated by turbomolecular pump to a base pressure of
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