Basic Study for the Development of Laser Doppler Vibrometer for the Detection c

초음파 측정용 레이저 도플러 진동계의 개발에 관한 기초연구

In order to detect the ultrasonic that is generated by the partial discharge of the heavy electric machinery, a Laser Doppler Vibrometer (LDV) was developed. A Michelson type interferometer which employed heterodyne signal process technique was built to measure the frequency and amplitude of vibration. The output signal of the fast photodetector was a frequency modulated signal centered at 40 MHz. The signal from the detector was amplified and downconverted to intermediate frequency centered at 1 MHz after mixing process. The voltage output that was proportional to the velocity of the moving surface(PZT) was obtained using PLL. The spectrum of the FM signal was analyzed and integration method was introduced to obtain amplitude information. This LDV can be used to measure the vibration of MEMS devices, automobiles, HDD and CDP.