$SiH_4$ + Ar 가스의 전자평균에너지 및 전자에너지분포함수 해석

The Analysis of the Electron Mean Energy and Electron Energy Distribution Function in $SiH_4$ + Ar gas

In $SiH_4$ + Ar mixture gas contains 0.5% and 5% monosilane, this paper calculated electron swarm parameters in E/N has ratio 1$\sim$300(Td) and P : I (Torr) by MCS and Beq method. Electron swarm parameters showed a irregularity change in Ar mixed a little monosilane. It tends that the electron drift velocity is inversely proportional to E/N. It also represented characteristics that the transverse diffusion coefficient depends on E/N.