Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07e
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- Pages.2341-2344
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- 1999
The Analysis of the Electron Mean Energy and Electron Energy Distribution Function in $SiH_4$ + Ar gas
$SiH_4$ + Ar 가스의 전자평균에너지 및 전자에너지분포함수 해석
- Lee, Hyoung-Yoon (Dongguk Univ. Electrical Engineering) ;
- Park, Myoung-Jin (Dongguk Univ. Electrical Engineering) ;
- Ha, Sung-Chul (Dongguk Univ. Electrical Engineering)
- Published : 1999.07.19
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