Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07g
- /
- Pages.3319-3321
- /
- 1999
The Characteristics of Flow Sensor Fabricated by MgO Medium Layer
MgO 매개층을 이용하여 제작된 유량센서의 특성
- Hong, Seok-Woo (School Of information and communcation Eng, DongSeo Univ.) ;
- Jang, Soo (School Of information and communcation Eng, DongSeo Univ.) ;
- Lee, Jong-Chun (School of Mechancal Eng) ;
-
Chung, Gwiy-Sang
(School Of information and communcation Eng, DongSeo Univ.)
- Published : 1999.07.19
Abstract
Pt-RTD and Micro Heater was fabricated by using MgO as medium layer in order to improve adhesion of Pt thin-films to
Keywords