Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Experiment on the effect of variations of voltage frequency and duty r on the electrochemical discharge machining of Pyrex glass

전압 주파수와 파형 폭 변화에 따른 유리의 미세 전해 방전 가공 성능에 대한 실험

  • Lee, Jung-Yong (Dept. of Precision Mechanical Engineering, Graduate School, Hanyang University) ;
  • Ahn, Yoo-Min (Dept. of Mechanical Engineering, Hanyang University) ;
  • Ahn, Si-Hong (School of Electrical Engineering, Seoul National University) ;
  • Park, Chi-Hyun (School of Electrical Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University)
  • 이정용 (한양대학교 정밀기계공학과 대학원) ;
  • 안유민 (한양대학교 기계공학과) ;
  • 안시홍 (서울대학교 전기공학부) ;
  • 박치현 (서울대학교 전기공학부) ;
  • 김용권 (서울대학교 전기공학부)
  • Published : 1999.07.19
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Abstract

Electrochemical discharge machining (ECDM) is a very recent technique in the fabrication of the micro-electro-mechanical system ( MEMS ) devices. This paper presents the experimental results of the machining of micro-holes on pyrex glass substrates by use of ECDM. Electrolyte is used with a KOH aqueous solution, cathode with copper, anode with platinum, and tool feed system is applied with gravity feed system. Already established experimental results were taken under the condition of constant voltage frequency. However in this paper, the effect of variation of the voltage frequency and duty ratio is considered. In this experiment, it is measured the ECDM performances with variation of the voltage frequency and duty ratio under the conditions of constant other machining variables. ECDM performances are described by the hole depth, and the top hole diameter.

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