대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 G
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- Pages.3286-3288
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- 1999
정전기력을 이용한 마이크로 액츄에이터 소지의 미소 기계적 구동특성 분석
Analysis of Micromechanical Characteristics of Microactuator Materials Using the Electrostatic Force
- 이세호 (서울대학교 재료공학부) ;
- 김재석 (서울대학교 재료공학부) ;
- 손동일 (서울대학교 재료공학부) ;
- 박유근 (삼성종합기술원 마이크로시스템실) ;
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권동일
(서울대학교 재료공학부)
- Lee, Se-Ho (School of Materials Science & Engineering Seoul National University) ;
- Kim, Jae-Sug (School of Materials Science & Engineering Seoul National University) ;
- Son, Dong-Il (School of Materials Science & Engineering Seoul National University) ;
- Pak, Yu-Keun (Micro Systems Lab., Samsung Advanced Institute of Technology) ;
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Kwon, Dong-Il
(School of Materials Science & Engineering Seoul National University)
- 발행 : 1999.07.19
초록
The electrostatically actuated test structure was presented to measure the micro mechanical characteristics of micromaterials as thin films forming the microactuators. The test structure was fabricated by the surface micromachining processes and driven by the electrostatic force, In order to measure the fracture toughness, the sharp notch in the test structure was introduced by the etching process. On the basis of the beam bending theory, the elastic modulus was measured by using the microcantilevr beam and the mechanical displacement, curvature and deflection curve under the electrostatic force was evaluated by using the electrostatic structure.
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