정전기력을 이용한 마이크로 액츄에이터 소지의 미소 기계적 구동특성 분석

Analysis of Micromechanical Characteristics of Microactuator Materials Using the Electrostatic Force

  • 이세호 (서울대학교 재료공학부) ;
  • 김재석 (서울대학교 재료공학부) ;
  • 손동일 (서울대학교 재료공학부) ;
  • 박유근 (삼성종합기술원 마이크로시스템실) ;
  • 권동일 (서울대학교 재료공학부)
  • Lee, Se-Ho (School of Materials Science & Engineering Seoul National University) ;
  • Kim, Jae-Sug (School of Materials Science & Engineering Seoul National University) ;
  • Son, Dong-Il (School of Materials Science & Engineering Seoul National University) ;
  • Pak, Yu-Keun (Micro Systems Lab., Samsung Advanced Institute of Technology) ;
  • Kwon, Dong-Il (School of Materials Science & Engineering Seoul National University)
  • 발행 : 1999.07.19

초록

The electrostatically actuated test structure was presented to measure the micro mechanical characteristics of micromaterials as thin films forming the microactuators. The test structure was fabricated by the surface micromachining processes and driven by the electrostatic force, In order to measure the fracture toughness, the sharp notch in the test structure was introduced by the etching process. On the basis of the beam bending theory, the elastic modulus was measured by using the microcantilevr beam and the mechanical displacement, curvature and deflection curve under the electrostatic force was evaluated by using the electrostatic structure.

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