대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 G
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- Pages.3268-3270
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- 1999
미소 유량 측정을 위한 마이크로 전 유량계의 제작
Fabrication of a Micro Magnetic Flowmeter for Micro Flow Rate Measurement
- Yoon, Hyeun-Joong (School of Electrical and Electronics Engineering Ajou University) ;
- Kim, Geun-Young (School of Electrical and Electronics Engineering Ajou University) ;
- Jeong, Ok-Chan (School of Electrical and Electronics Engineering Ajou University) ;
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Yang, Sang-Sik
(School of Electrical and Electronics Engineering Ajou University)
- 발행 : 1999.07.19
초록
This paper presents the fabrication of a micro electromagnetic flowmeter for liquid flow rate measurement. The flowmeter consists of a silicon flow channel with two electrodes and two permanent magnets. The micro flow channel and the detection electrodes are fabricated by the anisotropic etching of two silicon substrates and the metal evaporation process respectively. If conductive fluid passes through a magnet field, electromotive force is generated and detected by two electrodes. When the flow rate is 2.6 ml/sec, the measured output voltage is 7.4 mV.
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