대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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- Pages.1023-1025
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- 1998
알루미늄 플랩 밸브와 상변화 구동 마이크로 펌프의 제작
The fabrication of a micro pump with a flap valve and a phase change actuator
- Lee, Sang-Woo (School of Electronics Engineering, Ajou University) ;
- Sim, Woo-Young (School of Electronics Engineering, Ajou University) ;
- Yang, Sang-Sik (School of Electronics Engineering, Ajou University)
- 발행 : 1998.11.28
초록
This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is
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