Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
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- Pages.925-928
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- 1998
The Analysis of Electron Transport Characteristics in $SiH_4$ Plasma
$SiH_4$ 플라즈마중의 전자수송특성 해석
- Lee, Hyoung-Yoon (Dongguk Univ.) ;
- Ha, Sung-Chul (Dongguk Univ.) ;
- Kim, Dae-Yeon (Dongguk Univ.)
- Published : 1998.11.28
Abstract
In this paper, the electron transport characteristics in
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