Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
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- Pages.889-891
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- 1998
A Study on Patterning and Property of Cu Using Laser-Induced Deposition
레이저 유도 증착법을 이용한 CU의 패터닝 및 특성에 관한 연구
- Kim, Jae-Kwon (Dept. of Electrical Engineering, Inha University) ;
- Lee, Cheon (Dept. of Electrical Engineering, Inha University)
- Published : 1998.11.28
Abstract
Copper films have been deposited on glass substrate via a thermal decomposition of copper(II) formate using a focused
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